Agilent 6190575R002 Elekta Ion Pump 1515098

Agilent 6190575R002 / Elekta 1515098 VacIon Plus 35 L/S Ultra-High Vacuum (UHV) Sputter-Ion Pump

The Agilent Technologies 6190575R002 with Elekta Part Number 1515098 is a dedicated ultra high vacuum sputter ion getter pump designed to establish and hold pressure levels from 10 exp minus 4 mbar down to 10 exp minus 11 mbar. Built originally by Varian Vacuum Technologies and integrated under the Agilent VacIon family, this assembly functions as critical OEM flight hardware within high energy medical linear accelerators and high resolution scanning electron microscopy systems.

The internal mechanism utilizes a Penning discharge design with high purity grade 1 titanium cathode plates set parallel to a multicell cylindrical anode array. When energized by an external high voltage supply between plus 5.0 kV DC and plus 7.0 kV DC, crossed electric and permanent magnetic fields trigger cold cathode ionization of residual gas molecules. The resulting positive ions bombard the cathode surfaces, continuously sputtering reactive titanium. Chemically active gases like nitrogen, oxygen, and carbon oxides are captured by titanium chemisorption, while hydrogen dissolves directly into the cathode lattice and light inert gases undergo low energy ion burial.

Because the system possesses no internal moving parts, lubricated drive shafts, mechanical bearings, or working fluids, it provides continuous vibration free and hydrocarbon free operation. This zero contamination profile is required to prevent electrical breakdown, dielectric arcing, and micro pitting along linear accelerator accelerating structures, quartz radio frequency windows, and electron gun cathodes.

Model Details

• Manufacturer: Agilent Technologies / Varian Vacuum Technologies
• Primary Assembly MPN: 6190575R002
• Base Pump Core MPN: 6190575
• OEM Integrator: Elekta Oncology Systems
• Elekta Part Number: 1515098
• Third Party Supplier Reference: AEP 52400007
• Pump Family Series: VacIon Plus 35 Diode / V.F.III Series / Type 54
• Flange Connection: DN40 CF with 2.75 inch outer diameter clearance holes

Compatibility:

• Elekta Linear Accelerators: Elekta Synergy, Elekta Versa HD, Elekta Infinity, Elekta Precise, and Elekta Axesse radiation therapy systems.
• High Power Microwave Systems: Waveguide transmission runs, high power magnetron vacuum loops, and pulsed multi cavity klystrons.
• High Vacuum Analytical Platforms: Scanning electron microscopes, transmission electron microscopes, surface physics analysis systems, and synchrotron beam transport lines.

Key Features

1. Thirty five liters per second nitrogen pumping speed delivers rapid capture of residual gas loads down to sub ten exp minus ten mbar baseline vacuums.
2. Total dry capture pumping architecture operates without rotary components or synthetic oils, preventing hydrocarbon contamination on critical electron sources.
3. High dielectric alumina ceramic high voltage feedthrough resists internal metallization and surface conductive deposition over extended operating lifespans.
4. All metal bakeable vacuum envelope fabricated from 304L stainless steel permits system thermal bakeout up to 350 degrees Celsius without magnet blocks.
5. Direct discharge current proportional linearity enables the pump to double as an accurate broad range vacuum sensor between 10 exp minus 4 and 10 exp minus 10 mbar.

Applications

• Linear accelerator waveguide evacuated lines requiring continuous arcing suppression and dry vacuum preservation.
• Medical oncology radiotherapy vacuum maintaining units operating around the clock without mechanical noise or vibrations.
• High power radar and communications klystron tube envelopes demanding long term active gas containment.
• Electron beam gun chambers in metrology and semiconductor production requiring clean non oil background environments.
• Research UHV physics test cells requiring low current baseline outgassing and stable background pressures.

Frequently Asked Questions

What operating principle powers the Agilent 6190575R002 Elekta 1515098 pump?

The unit utilizes cold cathode sputter ion pumping. High voltage generates an intense electron cloud contained by permanent magnetic fields. Ionized gas molecules strike titanium cathodes, releasing sputtered titanium that captures residual gas chemically and mechanically without any moving mechanical drive parts.

What is the mechanical difference between 6190575 and 6190575R002?

The basic numerical sequence 6190575 denotes the bare vacuum body with standard magnet assemblies, while the 6190575R002 model includes factory hardware, tailored medical accelerator bracket assemblies, and high reliability termination specifically configured for Elekta linac equipment.

Can an ion pump pull down an accelerator vacuum from standard atmosphere?

No. An ion pump requires an auxiliary roughing package such as an oil free dry scroll pump paired with a turbomolecular vacuum pump to evacuate the manifold to at least 1 x 10 exp minus 4 mbar before the high voltage can be initiated safely.

How does the current reading relate to chamber vacuum level?

The ion discharge current generated within the anode cathode cells is directly proportional to the molecular gas density inside the pump. By measuring the current drawn through the power controller in microamperes, the pump doubles as a precision vacuum gauge spanning from 10 exp minus 4 down to 10 exp minus 10 mbar.

What is the correct way to handle a saturated ion pump?

When an ion pump becomes saturated with hydrogen or atmospheric gases over long operational periods, regenerate it by heating the vacuum body to 150 degrees Celsius while actively pumping the exhaust through an auxiliary turbomolecular pumping station until the outgassing rate drops.