MKS Type 247D 4-Channel Mass Flow Controller Readout & Power Supply
$998.00
5 in stock
MKS Type 247D 4-Channel Mass Flow Controller Readout and Power Supply
The MKS Type 247D is a benchtop and half-rack industrial power supply and display readout engineered to operate, power, and monitor up to four independent mass flow controllers (MFCs) or mass flow meters (MFMs) simultaneously. Built with linear power regulation delivering low-noise bipolar ±15 VDC operating voltage, the 247D provides reliable signal processing and precision setpoint generation across severe electrical environments—including shipboard emissions monitoring, semiconductor process gas delivery, and industrial furnace atmospheres.
Technical Specifications: MKS Type 247D
| Parameter | Technical Specification |
|---|---|
| Manufacturer | MKS Instruments, Inc. |
| Model / Series | Type 247D (Four-Channel Flow Readout / Power Supply) |
| Manufacturer Part Number (MPN) | 247D / 247D-4 / 247D-4-1 |
| Number of Channels | 4 Channels (Sequentially Selectable Single Display, Independent Simultaneous Operation) |
| Display Architecture | 3.5-Digit, 0.56-inch (14.2 mm) High-Efficiency Red LED Display (-1999 to +1999 counts) |
| Transducer Input Signal | 4 x (0 to +5.00 VDC) differential / single-ended (0 to 100% Full Scale) |
| Transducer Power Supply Output | ±15.0 VDC ±5% @ 1.0 A continuous total load; Ripple & Noise < 10 mV RMS |
| Setpoint Voltage Generation | Local: Front-panel 10-turn potentiometers (0 to 5.00 VDC); Remote: 0 to 5.00 VDC input |
| Gas Correction Factor (GCF) | Adjustable scaling 0.10 to 4.00 via rear-panel trim potentiometers (per channel) |
| Signal Outputs (Unscaled & Scaled) | Unscaled: 4 x (0 to 5 VDC, 10 kΩ min load); Scaled: 0 to 2 VDC full span |
| Remote Valve Overrides | TTL Low / Contact Closure: Valve Open, Valve Closed, Normal Control |
| Rear Interface Connectors | Transducer I/O: 4 x Card Edge / DB-15 female; Auxiliary I/O: Screw terminal & Edge connector |
| Line Voltage Requirements | 100/120/220/240 VAC ±10%, 50/60 Hz, 35 VA max (Rear selectable fuse block switch) |
| Enclosure Dimensions & Weight | Half-Rack 19″ (8.5″ W x 3.5″ H x 9.25″ D / 216 mm x 89 mm x 235 mm); 5.5 lbs (2.5 kg) |
| Operating Environmental Limits | Ambient Temperature: 15°C to 40°C; Storage: -20°C to 70°C; Humidity: 10% to 90% non-condensing |
Key Features
- Dedicated 10-Turn Command Pots: Each channel features a independent front-panel 10-turn locking dial for sub-millivolt setpoint precision alongside an independent Channel On/Off/Valve Override toggle switch.
- Integrated Gas Scaling Calibration: Rear-panel Gas Correction Factor (GCF) trimpots allow on-the-fly adjustment from 0.10 to 4.00, enabling multi-gas conversions without external signal conditioning.
- Dual Monitoring Outputs: Generates both direct 0–5 VDC unscaled voltage outputs and 0–2 VDC scaled linearized signals per channel for integration into PLCs, SCADA systems, or marine data loggers.
- Industrial Noise Rejection: Features high common-mode signal rejection designed for high-EMI environments, vacuum chambers, plasma generators, and vessel engine compartments.
Marine & Industrial Applications
- Continuous Marine Emission Monitoring (CEMS): Regulates precision span, zero, and calibration gas delivery for exhaust gas scrubbers and engine exhaust monitoring suites.
- Inert Gas & Blanketing Systems: Manages nitrogen purge, nitrogen envelope, and specialty inerting gas metering in offshore drilling, chemical tankers, and LNG cargo storage tanks.
- Thermal Treatment & Controlled Atmosphere Furnaces: Controls mass flow delivery for carburizing, nitriding, annealing, and sintering shield gases.
- Combustion Test Rigs & Pilot Plants: Bench-scale gas mixing and stoichiometric reactant delivery for aerospace and propulsion test benches.
Frequently Asked Questions
Can the MKS 247D control four different types or ranges of MFCs at the same time?
Yes. Each of the four channels features independent power routing, dedicated setpoint circuitry, and individual rear-panel scaling potentiometers. You can connect different full-scale flow ranges (e.g., Channel 1: 10 sccm, Channel 2: 5000 sccm) simultaneously.
What is the difference between the MKS 246 and MKS 247D?
The MKS Type 246 is a single-channel controller designed to power and monitor one MFC/MFM. The MKS Type 247D accommodates up to four MFCs/MFMs with a sequentially selectable 4-position front panel switch allowing continuous cycling through all four flow channels on a single readout display.
Can I control the flow rate setpoints from an external PLC instead of the front panel?
Yes. Setting the front-panel toggle to “Remote” routes setpoint generation to pins 4–7 of the rear interface, allowing external 0–5 VDC analog command signals from an automated PLC, Arduino/Raspberry Pi DAC, or marine controller.
Can I use the 247D with modern 9-pin Sub-D MKS mass flow controllers?
Yes. Legacy units connect via standard terminal pinouts, while modern 9-pin Sub-D mass flow controllers (such as the MKS G-Series or 1179B) connect directly using a standard 15-pin/9-pin adapter cable (such as MKS CB247 or custom-pinned shielded cable).
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